Ruthenium, as a rare platinum group metal, possesses unique physical and chemical properties that make it promising for a wide range of applications in the coating field. Coating technology is primarily used to improve the surface properties of various materials, such as enhancing hardness, corrosion resistance, and electrical performance. The specific applications of ruthenium targets in these fields are as follows:
Electronic Device Applications: Ruthenium targets can be used for thin-film deposition in electronic devices. Due to the excellent conductivity and corrosion resistance of ruthenium thin films, they are suitable for the manufacture of electronic devices in high-temperature, high-pressure, and corrosive environments. For example, in the manufacturing process of integrated circuits, ruthenium thin films can serve as barrier layers or conductive layers, enhancing circuit stability and performance.
Optical Applications: Ruthenium targets can also be used to prepare optical thin films and optical coatings. Ruthenium thin films exhibit good reflective and corrosion-resistant properties, making them widely demanded in fields such as lasers and optical instruments. For instance, in the manufacture of high-precision lasers, ruthenium thin films can provide better optical reflection performance, thereby improving the overall efficiency of the equipment.
Other Industrial Applications: Besides electronics and optics, ruthenium targets also exhibit significant performance in other industrial applications. For example, in catalyst manufacturing, ruthenium is a commonly used catalyst for many chemical reactions and can be utilized in the production of pharmaceuticals, plastics, and chemicals. Additionally, in battery materials, ruthenium can be used to manufacture high-performance battery materials such as ruthenium oxide batteries and ruthenium lithium batteries.